ASTM F1367-98(2011) - 1.6.2011
 
1. Scope

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

 
2. Referenced Documents

E112-13(2021)

Standard Test Methods for Determining Average Grain Size