1.1 This guide covers specimen preparation and mounting prior to, during, and following surface analysis.

1.2 This guide applies to the following surface analysis disciplines:

1.2.1 Auger electron spectroscopy (AES),

1.2.2 X-ray photoelectron spectroscopy (XPS or ESCA), and

1.2.3 Secondary ion mass spectrometry, SIMS.

1.2.4 Although primarily written for AES, XPS, and SIMS, methods will also apply to many surface sensitive analysis methods such as ion scattering spectrometry, low energy electron diffraction, and electron energy loss spectroscopy, where specimen handling can influence surface sensitive measurements.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.