ASTM E1127-91(1997) - 10.9.1997
 
1. Scope

1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.

1.2 Guidelines are given for depth profiling by the following:

Section Ion Sputtering 6 Angle Lapping and Cross-Sectioning 7 Mechanical Cratering 8 Nondestructive Depth Profiling 9

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

 
2. Referenced Documents

ISO/TR?22335:?2007

Surface Chemical Analysis--Depth Profiling--Measurement of Sputtering Rate: Mesh-Replica Method Using a Mechanical Stylus Profilometer

E1829-14(2020)

Standard Guide for Handling Specimens Prior to Surface Analysis

E1636-10

Standard Practice for Analytically Describing Depth-Profile and Linescan-Profile Data by an Extended Logistic Function (Withdrawn 2019)

E827-08

Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy (Withdrawn 2017)

E996-19

Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

E1078-14(2020)

Standard Guide for Specimen Preparation and Mounting in Surface Analysis

E1577-11

Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis (Withdrawn 2020)

E673-03

Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

E684-04

Standard Practice for Approximate Determination of Current Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces (Withdrawn 2012)

E1634-11(2019)

Standard Guide for Performing Sputter Crater Depth Measurements