Interpretation of static SIMS mass spectral data can be complicated due to the complexity and density of data obtained and therefore, variability often occurs when users are not consistent in their methods of data interpretation This guide is intended to help avoid these inconsistencies, by discussing the most commonly observed scenarios in static SIMS analysis and how to approach these scenarios.

This guide can be used as a training guide for employees or students, or both.

1.1 This guide provides time-of-flight secondary ion mass spectrometry (ToF-SIMS) users with a method for forms of interpretation of mass spectral data. This guide is applicable to most ToF-SIMS instruments and may or may not be applicable to other forms of secondary icon mass spectrometry (SIMS).

1.2 This guide does not purport to address methods of sample preparation. It is the responsibility of the user to adhere to strict sample preparation procedures in order to minimize contamination and optimize signals. See Guide E1078 and ISO 18116 for sample preparation guidelines.

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.