Auger electron spectroscopy is often capable of yielding information concerning the chemical and physical environment of atoms in the near-surface region of a solid as well as giving elemental and quantitative information. This information is manifested as changes in the observed Auger electron spectrum for a particular element in the specimen under study compared to the Auger spectrum produced by the same element when it is in some reference form. The differences in the two spectra are said to be due to a chemical effect or a matrix effect. Despite sometimes making elemental identification and quantitative measurements more difficult, these effects in the Auger spectrum are considered valuable tools for characterizing the environment of the near-surface atoms in a solid.

1.1 This guide outlines the types of chemical effects and matrix effects which are observed in Auger electron spectroscopy.

1.2 Guidelines are given for the reporting of chemical and matrix effects in Auger spectra.

1.3 Guidelines are given for utilizing Auger chemical effects for identification or characterization.

1.4 This guide is applicable to both electron excited and X-ray excited Auger electron spectroscopy.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.