ASTM E984-95 - 1.1.2001
 
1. Scope

1.1 This guide outlines the types of chemical effects and matrix effects which are observed in Auger electron spectroscopy.

1.2 Guidelines are given for the reporting of chemical and matrix effects in Auger spectra.

1.3 Guidelines are given for utilizing Auger chemical effects for identification or characterization.

1.4 This guide is applicable to both electron excited and X-ray excited Auger electron spectroscopy.

1.5 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

 
2. Referenced Documents

ISO 18118:2004

Surface Chemical Analysis--Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy--Guide to the Use of Experimentally Determined Relative Sensitivity Factors for the Quantitative Analysis of Homogenous Materials

E996-19

Standard Practice for Reporting Data in Auger Electron Spectroscopy and X-ray Photoelectron Spectroscopy

E983-19

Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

E827-08

Standard Practice for Identifying Elements by the Peaks in Auger Electron Spectroscopy (Withdrawn 2017)

E673-03

Standard Terminology Relating to Surface Analysis (Withdrawn 2012)