ASTM F816-83(1998)e1 - 10.5.1998
 
1. Scope

1.1 This test method applies to hermetic package leak testing to detect leaks of a broad spectrum in size with a minimum detection level equal to the sensitivity of the helium mass spectrometer equipment used in the test.

 
2. Referenced Documents

E691-23

Standard Practice for Conducting an Interlaboratory Study to Determine the Precision of a Test Method

F78-97

Standard Test Method for Calibration of Helium Leak Detectors by Use of Secondary Standards

F98-72(1977)

Recommended Practices for Determining Hermeticity of Electron Devices by a Bubble Test (Withdrawn 1990)

Federal Standard209B

Clean Room and Work Station Requirements, Controlled Environment

F134-85(1990)

Test Methods for Determining Hermeticity of Electron Devices with a Helium Mass Spectrometer Leak Detector (Withdrawn 1996)